Product Overview

The VARIAN 100010077-06 is a precision-engineered vacuum system control module developed by Varian (now part of Agilent Technologies), a leader in analytical and industrial vacuum technology. Designed exclusively for Varian’s vacuum ecosystems—including turbomolecular pumps, vacuum gauges, and process chambers—the VARIAN 100010077-06 acts as a central command unit, regulating pressure, monitoring pump performance, and enabling seamless communication between vacuum components. Its specialized design ensures ultra-stable control of vacuum levels (critical for applications like semiconductor wafer processing, mass spectrometry, and thin-film deposition), while compliance with ISO 9001 and SEMI F47 standards guarantees compatibility with high-precision industrial workflows. With a compact, rack-mountable form factor, built-in diagnostic tools, and support for Varian’s proprietary communication protocols, the VARIAN 100010077-06 minimizes process variability, reduces unplanned downtime, and enhances the reliability of vacuum-dependent operations—solidifying its role as a cornerstone component in Varian-powered systems.
Hainan Jinlin Mechanical & Electrical is a distributor of industrial control products, specializing in a wide range of brands. We possess extensive industry knowledge and market insights. Adhering to the “Customer First, Forge Ahead” business philosophy, we provide high-quality customer service. We’re here for you, dedicated to meeting your needs!

Technical Specifications

Parameter
Value
Product Model
VARIAN 100010077-06
Manufacturer
Varian (Agilent Technologies)
Product Type
Vacuum System Control Module (for Varian Turbomolecular Pumps/Gauges)
Control Range
1×10⁻⁹ mbar to 1×10³ mbar (compatible with Varian cold cathode/ion gauges)
Communication Protocols
Varian Proprietary RS485 Bus, Ethernet (Modbus TCP for remote monitoring)
Power Supply Voltage
100-240 V AC (50/60 Hz), 24 V DC auxiliary output (for gauges)
Operating Temperature
5 °C to +40 °C (41 °F to +104 °F)
Compatibility
Varian Turbo-V 300/500 Pumps, Varian 951-5012 Ion Gauges
Protection Features
Overvoltage protection, pump overload shutdown, pressure limit alarms
Mounting Type
19-inch rack mounting (1U height)
IP Rating
IP20 (front panel), IP30 (chassis)
Display Interface
2.4-inch LCD (pressure readout, status indicators)

Key Features and Benefits

The VARIAN 100010077-06 delivers specialized value for vacuum system control, with features optimized for precision, reliability, and ease of integration into Varian’s ecosystem:
Rockwell Automation 1492-P10PD4S-1RE1GIEC Feed-Through Push-in Terminal Block

Ultra-Precision Vacuum Regulation

At its core, the VARIAN 100010077-06 provides closed-loop control of vacuum levels, with a measurement resolution of 1×10⁻⁹ mbar—critical for applications like semiconductor etching, where even minor pressure fluctuations can damage wafers. It automatically adjusts pump speed or valve positions to maintain setpoint pressure, eliminating manual intervention and reducing process variability by up to 30% compared to manual control systems.

Integrated Diagnostics & Alarm Systems

The VARIAN 100010077-06 includes real-time diagnostic tools to monitor pump health (e.g., bearing temperature, motor current) and gauge functionality. It triggers visual/audio alarms for critical issues—such as sudden pressure spikes, pump overheating, or gauge failure—and logs events for post-incident analysis. This proactive monitoring reduces unplanned downtime by enabling predictive maintenance, a key advantage for 24/7 industrial processes like pharmaceutical manufacturing.

Seamless Varian Ecosystem Compatibility

As a native Varian module, the VARIAN 100010077-06 requires no custom adapters to connect to Varian turbomolecular pumps (e.g., Turbo-V 500) or vacuum gauges. It auto-detects connected components via the proprietary RS485 bus and syncs with Varian’s Vacuum Control Software (VCS), allowing users to configure setpoints, view historical pressure data, and remotely operate the system from a central HMI—streamlining workflow management for multi-chamber facilities.

Related Models

  • VARIAN 100010077-05 – Predecessor to the VARIAN 100010077-06, lacking Ethernet connectivity but retaining core vacuum control functionality for legacy Varian systems.
  • VARIAN 100010077-07 – Enhanced version of the VARIAN 100010077-06 with expanded compatibility (supports Varian Turbo-V 800 Pumps) and advanced cybersecurity features (role-based access control).
  • VARIAN 951-5012 – Ion gauge module paired with the VARIAN 100010077-06, providing high-precision pressure measurement down to 1×10⁻¹⁰ mbar.
  • VARIAN 100010088-01 – Power supply module for the VARIAN 100010077-06, offering redundant 24 V DC output for critical gauge operation.
  • VARIAN 100010077-06-R – Refurbished variant of the VARIAN 100010077-06, certified by Agilent for performance and compatibility, ideal for cost-sensitive upgrades.
  • VARIAN 100010099-02 – Multi-chamber control module, expanding the VARIAN 100010077-06’s capabilities to manage up to 4 independent vacuum chambers (e.g., in semiconductor fabs).

Company & Service Highlights

EMERSON 5X00502G01 Controller - Custom Processing, High Performance Industrial Control Module

Hainan Jinlin Mechanical and Electrical Equipment Co., Ltd., a distributor of industrial control products from various brands, specializes in selling industrial control products. Leveraging extensive industry knowledge and market insights, we adhere to the business philosophy of “Customer First, Striving for Progress” and prioritize customer service to provide customers with high-quality services. We are committed to serving your needs and are dedicated to meeting them!
As a certified partner of industry leaders such as Bentley Nevada, Honeywell, and Varian (Agilent Technologies), we provide key components for the following areas:

Typical Application Areas

  • Semiconductor Manufacturing: Controlling vacuum levels in wafer etching chambers, where the VARIAN 100010077-06 ensures stable pressure for consistent feature formation on microchips.
  • Analytical Laboratories: Integrating with Varian mass spectrometers, using the VARIAN 100010077-06 to maintain ultra-high vacuum (UHV) conditions for accurate sample analysis.
  • Thin-Film Deposition: Regulating vacuum in sputtering systems for solar panel production, leveraging the VARIAN 100010077-06’s closed-loop control to ensure uniform film thickness.
We offer a one-year warranty on all products, including the VARIAN 100010077-06, and provide specialized pre-sales support (e.g., compatibility testing with your existing Varian pumps, vacuum system layout consulting) and after-sales service (e.g., on-site calibration, firmware updates). If you cannot find the model you need, please contact us immediately.

Contact Information